Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening - new
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...
A. Arevalo , J. Prieto , M. M. Hussain , I. G. Foulds ,
 Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Vancouver, BC, Canada
The role of stretchable electronics systems allows the design of new reconfigurable macro-electronics, that extends a device capability to function as a distributed sensor network which can potentially be used for wearable electronics. At the moment such devices are primarily based on polymeric materials such as PDMS or Polyimide. Nevertheless, silicon has been the predominant material in ...
Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM) - new
B. Park , T. Chen , C. Shafai ,
 Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada
This poster presents the design and analysis of a novel horseshoe shaped MEMS actuator for adaptive optics. The actuation mechanism is Lorentz force enabling low current (below 10 mA) operation. The actuator combined with an overlying aluminum coated SU-8 soft polymer membrane for the mirror, together form the complete adaptive optics system to enable correction of wavefront distortion of ...
A. El Kacimi , E. Pauliac-Vaujour , J. Eymery 
 University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
 University Grenoble Alpes, CEA, Grenoble, France
We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a capacitive structure. The device characteristics directly depend on growth conditions for example by tuning ...
H. J. Hall , L. A. Starman ,
 Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA
Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with minimal mass. When reflective coatings (usually metallic Au or Al) are applied to micromirror surfaces in order to meet optical reflectivity requirements the resulting film stress (usually tensile) can be substantial. The mass of the mirror can be a limiting factor in the dynamic performance. ...
A. Arevalo , J. P. Rojas , D. Conchouso , M. M. Hussain , I. G. Foulds 
 Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Okanagan Campus, Canada
Energy efficiency and harvest, speed and performance, flexibility and portability are key elements for innovation in the current consumer electronics markets. Thermoelectric Generators can convert energy from heat gradients into electricity. Every source of heat from an electronics device can potentially be used as a source of energy. This generators have the advantage of: being silent, compact, ...
M. I. Hassan , A. Brimmo , A. N. Chatterjee ,
 Masdar Institute of Science and Technology, Abu Dhabi, UAE
 MEMS Department, GLOBALFOUNDRIES, Singapore, Singapore
The multilayer composite single mass cantilever is a MEMS energy harvester structure. The vibrating structure is under vacuum in hermetic MEMS. However, out-gassing during process integration and fabrication would cause air molecules (e.g. hydrogen, nitrogen, argon, water vapor, oxygen, ammonia, nitrous oxide, carbon dioxide, carbon monoxide, etc.) to be present in the cavity, and therefore vary ...
A. T. Galisultanov , P. Le Moal , V. Walter , G. Bourbon ,
 FEMTO-ST, Besanson, France
During last twenty years capacitive micromachined ultrasonic transducers (CMUT) have been developed extremely fast [1-2]. CMUT is an attractive alternative to traditional piezoelectric transducer, which converts electrical signal to mechanical vibration and vice versa. The main advantages of CMUT compared to most common solution: wide bandwidth (improved image resolution) and compatibility with ...
COMSOL Multiphysics® Software Simulation of a Dual-axis MEMS Accelerometer with T-Shaped Beams - new
C. Zheng , X. Xiong , J. Hu 
 Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
 Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA
Introduction: Inertial navigation requires acceleration measurement along all three degree-of-freedoms. Most accelerometers are designed to measure acceleration along a single sensitive direction. For complete inertial sensing, a move effective accelerometer which can sense acceleration along multiple axes is needed. In this research, a dual-axis MEMS (Microelectromechanical Systems) ...
Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness - new
Y. Jin , S. Kumar , R. A. Gerhardt ,
 School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA
1. Introduction The electrical properties of materials are important in many different applications. In microelectronics for example, films must perform as insulators, semiconductor or as conducting layers. In recent years, scanning probe methods are being extended to the nanometre scale range since accurate high spatial resolution measurements of electrical properties are of great interest ...