AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...
J. Vijitha, S. S. Priya, K. C. Devi
PSG College of Technology, Coimbatore, Tamil Nadu, India
Sleep apnea is a type of sleep disorder characterized by pauses in breathing or instances of shallow or infrequent breathing during sleep. There is a need to diagnose sleep apnea since it leads to fluctuations in the oxygen level that in turn affect the heart rate and blood pressure. In order to detect this disorder, a Micro Electro Mechanical System (MEMS) based piezoelectric pressure sensor ...
R. Berthelon , D. Dutartre , F. Andrieu 
 STMicroelectronics, France
 CEA Leti, France
The integration of high level of stress in field effect transistors is performed through incorporation of intrinsically strained SiGe layers. With the help of COMSOL simulations, we performed two studies addressing the level of stress in the area of interest. In the first case, we analyzed the geometric effects of the SiGe film stress relaxation on the edges. In a second time, we studied the ...
L. Moro, F. Lugli, and F. Zerbetto
Department of Chemistry “G. Ciamician”, Università di Bologna, Bologna, Italy
Rotaxanes are a class of molecules recently developed in laboratory that have been heralded as possible molecular motors. The motor is constituted by a linear molecule (thread) and a ring-shaped molecule (macrocycle), which is free to move along the thread, switching between two, or more, energetically stable interaction points (stations). Molecular motors start their functioning far from ...
S. N. Das, G. Bose
Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India
This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. ...
J. Liu , V. B. Chalivendra , C. Goldsmith , W. Huang ,
 Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
 MEMtronics Corporation, Richardson, TX, USA
Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS performance and reliability. Multi scale regular-fractal structure is observed on MEMS surface. Nonlinear Structural ...
P. D. Hanasi, B. G. Sheeparamatti, B. B. Kirankumar
Basaveshwar Engineering College, Bagalkot, Karnataka, India
Micro cantilevers are the basic MEMS structures, which can be used both as sensors and actuators. The . The objective of this work is to study concept of pull-in voltage and how to reduce the same. Voltage is applied to upper cantilever beam and lower contact electrode is made as ground. By increasing common area between cantilever beam and contact electrode, and also by reducing thickness of ...
The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)
B.N. Johnson, and R. Mutharasan
Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA
A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that have demonstrated high sensitivity to mass-change in experimentally fabricated sensors. The fundamental bending mode of vibration and the 1st bending harmonic are predicted at 10.0 kHz and 86.8 kHz, respectively, within approximately 5 % of the experimentally measured resonances. The ...
V. S. Nagaraja, N. Suma, and S. L. Pinjare
Nitte Meenakshi Institute of Technology
The tunable capacitor (variable capacitor) is one of the most important and components in filters, Phase shifters, VCO etc. A tunable capacitor can also be built using electro – thermal actuating mechanism. Compared to electro static, tunable capacitors actuated by thermal actuators have several advantages like lower driving voltages. The performance of thermal actuator becomes a key factor ...
Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.