F. Bircher and P. Marmet
Institute of Print Technology, Bern University of Applied Sciences, Burgdorf, Switzerland
Electromagnetic micro valves are currently developed empirically or the different physics are treated separately. To accelerate the development-process and for a better understanding of the overall system, a multiphysics simulation is built up. This simulation considers the electromagnetics, the electronics (including the control of the process), the mechanics and the fluidics with respect to the ...
H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA
In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and nano- scale since it diminishes the high performance of MEMS devices. For instance, depending on the stiffness ...
Design and Development of Microsystems within a Corporate Research Environment by Utilizing Comsol Multiphysics
Corporate Research & Technologies
Alexander Frey received his M.A. degree from the University of Texas, Austin, in 1994, the Dipl. Phys. degree from the University of Wuerzburg, Germany in 1997 and the PhD from the Saarland University, Germany in 2010. In 1997 he joined Research Laboratories of Siemens working on the design of DRAM sensing circuits. In 1999 he joined Corporate Research, Infineon, Munich, Germany. He was engaged ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
This paper covers the following: * All-Optical Light Modulation of surface plasmon polaritons (SPPs) is achieved using asymmetric single nanoslits. A high on/off switching ratio of >20 dB and phase variation of >? were observed with the device lateral dimension of only about 2 ?m. * Efficient unidirectional excitation of SPP as well as beam splitting are achieved using the ...
M. Algappan, P. C. Chakravarthi, R. Keerthana, S. Mangayarkarasi, A. Kandaswamy
PSG College of Technology, Coimbatore, Tamil Nadu, India
A medical ventilator is an imperative device used to save life by delivering an assortment of air and oxygen into and out of the patients’ lungs to administer breathing or to assist obligatory breathing. The commercially available diaphragm based pressure sensors made up of silicon measure the air and oxygen flow. The proposed work utilizes the Piezo electric material for the pressure range ...
V. Nivethitha, S. P. Rakavi, K. C. Devi
PSG College Of Technology, Coimbatore, Tamil Nadu, India
In this work, a piezoelectric tactile sensor will be designed and simulated using COMSOL Multiphysics®. The sensor is designed in order to assess the pressure exerted on the human body while the robotic surgery is performed. The sensor consists of a rigid and compliant cylindrical element. A circular PDMS (Polydimethylsiloxane) film is sandwiched between the rigid cylinder and the base plate to ...
E. Gutierrez-Miravete, and J. Streeter
Department of Engineering and Science, Rensselaer at Hartford, Hartford, Connecticut, USA
Optiwind, Torrington, Connecticut, USA
The bearing and shaft are part of a safe and arm device constructed as an assembly by a multi-layer additive/subtractive plating and planarization processes (EFAB technology). Devices are constructed by a multi-layer additive/subtractive planarization process. This paper evaluates the lubricating flow between the shaft and journal of the MEMS bearing for seven configurations. The pressure ...
Interfacing Continuum and Discrete Methods: Convective Diffusion of Microparticles and Chemical Species in Microsystems
CEA-LETI, Department of Biotechnology, Grenoble, France
Convective transport of macromolecules or micro and nanoparticles in microsystems are usually predicted by solving the Navier Stokes equations for the carrier fluid and a concentration equation for the diffusing species. In the case of isolated particles or complicated geometries with extremely small apertures or microporous material, the concentration equation maybe replaced by a Monte Carlo ...
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...