A. Arevalo , D. Conchouso , D. Castro , I. G. Foulds ,
 Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Vancouver, BC, Canada
The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the evolution of the digital era. The loudspeaker design has not been changed for almost a century [1-5]. The acoustic transducer is the last analogue component needed for a true digital audio system. We want to validate the feasibility of using an ...
G. Zhu, and Y. Li
Lawrence Technological University, Southfield, MI, USA
Fluids used in biomedical microelectromechanical systems (BioMEMS) devices often exhibit very different flow behavior from those in bulk solutions, which in turn affects the behavior of cells and biomolecules in the device. In this work, we investigate an integrated microfluidic system for living cell culture and assay. The system can be used as a generic platform to study the behavior of ...
S. Prabhu , Nagbhushan ,
 Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India
Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure variations of acoustic signals and noise in the water and produces an output voltage proportional to the pressure. Here the attempt is made to design and simulate MEMS based underwater acoustic sensor whose working is based on piezoresistive physics. ...
V. S. P. Rajesh ,
 St. Mary's Group of Institutions, Hyderabad, India
3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are analyzed at resonance & anti-resonance frequencies. Operating frequency is from 8.7 MHz which acts as start band and 9.2 MHz as stop band. FIDT model helps in energy optimization by focusing the propagating wave more on to the poly-chemical coating. ...
S. Satti, M. Baghini
Indian Institute of Technology Bombay, Mumbai, Maharashtra, India
As a part of a lab-on-chip-device, more often it is required to measure dielectric constant of the fluid. For this purpose it is necessary to develop a sensor whose size is compatible with microfluidic channel. The work, presented in this paper, studies effect of the parameters influencing sensitivity of such a sensor and ultimately optimizes these dimensions to maximize the sensitivity. We ...
A. El Kacimi , E. Pauliac-Vaujour , J. Eymery 
 University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
 University Grenoble Alpes, CEA, Grenoble, France
We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a capacitive structure. The device characteristics directly depend on growth conditions for example by tuning ...
P. Graak , S. Kaur , A. Gupta , P. Chhabra , D. Kumar , A. Shetty 
 Kurukshetra University, Kurukshetra, Haryana, India
 Indian Institute of Science, Bengaluru, Karnataka, India
The ambient vibrations can be of great promise for harvesting energy initially at small scale to use for micro and nano scale devices. Such vibrations converted to electrical energy by piezoelectric transducer due to their major significance. Various research journals have introduced the phenomenon of energy optimization to increase the generated power and used directly for application like ...
T. Andersen, M. A. E. Andersen, O. C. Thomsen
DTU Elektro, Technical University of Denmark, Kgs. Lyngby, Denmark
In this work COMSOL is utilized to obtain the Mason lumped parameter model for a piezoelectric transformer (PT) design. The Mason lumped parameters are relevant in the design process of power converters. The magnitude of the impedance is simulated for a specific interleaved multilayer thickness mode PT. The PT design has been prototyped and the measurements results are compared with simulations. ...
H.R. Javani, P. Kagan, F. Huizinga
ASML - MDev – Mechanical analysis, Veldhoven, The Netherlands
ASML - MDev – System Dynamics, Veldhoven, The Netherlands
Air bearings are special type of bearings which provide nearly zero friction between two surfaces. This is achieved by a compressed layer of gas between the surfaces. This study presents a modeling technique for an Air bearing component. COMSOL Multiphysics® is used to efficiently solve a coupled Fluid-Structure Interaction analysis. Computational time is significantly reduced compared to ...
Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...