S. Aoyagi1, and Y.-C. Tai2
1Robot & Microsystem Laboratory, Kansai University, Osaka, Japan
2Caltech Micromachining Laboratory, California Institute of Technology, Pasadena, USA
A new type of accelerometer is demonstrated which consists of a dielectric seismic mass and a comb-shaped planar capacitor underneath it. The simple structure of the device allows the use of polymer Parylene as the proof mass, so the technology is greatly simplified and only surface micromachining is required. The measuring principle is detecting capacitance change according to the dielectric ...
N. Al Cheikh, P. Xavier, J. Duchamp, and K. Schuster
Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Grenoble, France
Institute of Millimetrics Radio Astronomy (IRAM), Grenoble, France
Superconducting GHz electronics circuits are frequently used in Radio Astronomy instrumentation. The features of these instrumentations can be significantly improved by using tuneable capacitances, which can be realized by electrically actuated, micromechanical bridges (MEMS) made of superconducting Niobium (Nb). In order to analyze the electromechanical behavior of such devices and the intrinsic ...
Design and Development of Microsystems within a Corporate Research Environment by Utilizing Comsol Multiphysics
Corporate Research & Technologies
Alexander Frey received his M.A. degree from the University of Texas, Austin, in 1994, the Dipl. Phys. degree from the University of Wuerzburg, Germany in 1997 and the PhD from the Saarland University, Germany in 2010. In 1997 he joined Research Laboratories of Siemens working on the design of DRAM sensing circuits. In 1999 he joined Corporate Research, Infineon, Munich, Germany. He was engaged ...
L.B.M. Silva, E.J.P. Santos
Laboratory for Devices and Nanostructures, Electronics and Systems Department, Universidade Federal de Pernambuco, Recife, PE, Brasil
Transducer optimization is a key aspect for successful development and deployment of advanced sensors, especially when designing 3D structures for harsh environments. For piezoelectric transducers, plate thickness determines the operating frequency of the resonator, which is frequently tuned in the shear thickness vibration mode. Quartz has been the material of choice for the fabrication of bulk ...
K. M. V. Swamy, B. G. Sheeparamatti, G. R. Prakash
Basaveshwara Engineering Collage, Bagalkot, Karnataka, India
This work presents the study of spiral RF MEMS switch which has low actuation voltage due to spiral structure. This work is inspired by the superior performance of electrostatic RF MEMS switches over the conventional state-of-the-art solid-state devices and the potential applications in communication field. The customary high actuation voltage limits the reliability and applications especially in ...
C. Grau Turuelo, B. Bergmann, C. Breitkopf
Technische Universität Dresden, Dresden, Germany
The void shape evolution of a trench patterned silicon substrate results in diverse cavities by varying initial conditions. The size and the arrangement of the initial trenches are decisive for the transformation process besides the annealing conditions which are, in fact, time and temperature, and the existing pressure values. The prediction of the shape evolution depending on different ...
Shambhu Singh, Dr. N N Sharma
Birla Institute of Technology and science, Pilani, Rajasthan, India
A solid state Piezoelectric Micro Machined Modal Gyroscope is a vibratory type of gyroscope which sense the motion by voltage induced due to Coriolis force. It utilizes natural frequency of the structure to maximize the displacements and hence maximizing the induced voltage signals for sensing.The mode suitable for gyroscopic motion is 9th mode, which was found to be vibrating at 350.217 kHz. A ...
S. Harrison, M. Young, M. Hayne, P. D. Hodgson, R. J. Young, A. Strittmatter, A. Lenz, U. W. Pohl, D. Bimberg
Department of Physics, Lancaster University, Lancaster, UK
Institut für Festkörperphysik, Berlin, Germany
Low-dimensional semiconductor nanostructures, in which charge carriers are confined in a number of spatial dimensions, are the focus of much solid-state physics research, offering superior optical and electronic properties over their bulk counterparts. Both two-dimensional (2D) and zero-dimensional (0D) structures have seen wide-ranging applications in laser diodes, solar cells and LEDs to name ...
J. T. Andrews, S. Chaurasiya, O. P. Chaudhary, D. Agarwal
National MEMS Design, Department of Applied Physics, Shri G S Institute of Technology & Science, Indore Madhya Pradesh, India
By introducing a periodic modulation in a waveguide, it is possible to create an interaction between forward-traveling and backward-traveling modes of an optical waveguide. Bragg grating may be a one dimensional diffraction grating which diffracts light from the forward-traveling mode into the backward traveling mode. Since the Bragg grating reflects at the wavelength for which it is ...
A. Weddemann, A. Auge, F. Wittbracht, C. Albon, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we demonstrate the implementation of the micromagnetic equations for the description of ferromagnetic thin films in COMSOL Multiphysics®. We apply our model to magnetoresistive sensors consisting of several soft ferromagnetic layers and their response to magnetic particles. The magnetization dynamic of the particles needs to be described in a similar manner, though due to size ...