The Application Gallery features COMSOL Multiphysics tutorial and demo app files pertinent to the electrical, mechanical, fluid, and chemical disciplines. You can download ready-to-use tutorial models and demo apps with step-by-step instructions for how to create them yourself. The examples in the gallery serve as a great starting point for your own simulation work.

Use the Quick Search to find tutorials and apps relevant to your area of expertise. Log in or create a COMSOL Access account that is associated with a valid COMSOL license to download the MPH-files.


In-Plane Microwave Plasma

Wave heated discharges may be very simple, where a plane wave is guided into a reactor using a waveguide, or very complicated as in the case with ECR (electron cyclotron resonance) reactors. In this example, a wave is launched into reactor and an Argon plasma is created. The wave is partially absorbed and reflected by the plasma which sustains the plasma.

3D ICP Reactor, Argon Chemistry

3D plasma modeling is possible to do in COMSOL. A square coil is placed on top of a dielectric window and is electrically excited at 13.56MHz. A plasma is formed in the chamber beneath the dielectric window, which contains Argon gas at low pressure (20 mtorr). The gas flows into the process chamber from two 2 inch ports and the gas is extracted through a single 4 inch port. The plasma is ...

Electrodeless Lamp

This model simulates an electrodeless lamp with argon/mercury chemistry. The low excitation threshold for mercury atoms means that even though the mercury is present in small concentrations, its behavior dominates. There is strong UV emission from the plasma at 185 nm and 253 nm. The UV emission can stimulate phosphors coated on the surface of the bulb. From an electrical point of view, the lamp ...

DC Glow Discharge

DC glow discharges in the low-pressure regime have long been used for gas lasers and fluorescent lamps. DC discharges are attractive to study because the solution is time independent. The 1D and 2D models show how to use the DC Discharge interface to set up an analysis of a positive column. The discharge is sustained by emission of secondary electrons at the cathode.

Capacitively Coupled Plasma Simulator

The NIST Gaseous Electronics Conference has provided a platform for studying Capacitively Coupled Plasma (CCP) reactors, which is what this application is based upon. The operating principle of a capacitively coupled plasma is different when compared to the inductive case. In a CCP reactor, the plasma is sustained by applying a sinusoidal electrostatic potential across a small gap filled with a ...

Thermal Plasma

This model simulates a plasma at medium pressure (2 torr) where the plasma is still not in local thermodynamic equilibrium. At low pressures the two temperatures are decoupled but as the pressure increases the temperatures tend towards the same limit.

Atmospheric Pressure Corona Discharge

This model simulates a negative corona discharge occurring in between two co-axially fashioned conductors. The negative electric potential is applied to the inner conductor and the exterior conductor is grounded. The modeled discharge is simulated in argon at atmospheric pressure.

Ion Energy Distribution Function

One of the most useful quantites of interest after solving a self-consistent plasma model is the ion energy distribution function (IEDF). The magnitude and shape of the IEDF depends on many of the discharge parameters; pressure, plasma potential, sheath width etc. At very low pressures the plasma sheath is said to be collisionless, meaning that the ion energy is not retarded by collisions with ...

Oxygen Boltzmann Analysis

The Boltzmann equation can be solved to validate sets of electron impact collision cross sections. In fact, sets of collision cross sections are traditionally inferred by solving a two-term approximation to the Boltzmann equation and comparing the results to swarm experiments. This model solves a two-term approximation to the Boltzmann equation and compares the computed drift velocity and ...

Surface Chemistry Tutorial

Surface chemistry is often the most important and most overlooked aspect of reacting flow modeling. Surface rate expressions can be hard to find or not even exist at all. Often it is preferable to use sticking coefficients to describe surface reactions because they can be estimated intuitively. The tutorial model simulates outgassing from a wafer during a chemical vapor deposition (CVD) ...

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