COMSOL Conference 2015

MEMS and Nanotechnology

Read these papers, posters, presentations, and abstracts to see how multiphysics simulation is used for the design and optimization of MEMS and nanodevices, such as biosensors, energy harvesters, accelerometers, and actuators.

A Comparison of Mass Reduction Methods for Silicon-on-Oxide (SOI)-based Micromirrors

H. J. Hall , L. A. Starman

Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA

CMUT Based Free Membrane Intra-Cardiac Volumetric Blood Flow-Meter

P. Priya 1, B. D. Pant 2

1 Birla Institute of Technology and Science Pilani, Pilani, Rajasthan, India
2 CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

COMSOL Multiphysics® Software Simulation of a Dual-axis MEMS Accelerometer with T-Shaped Beams

C. Zheng 1, X. Xiong 1, J. Hu 2

1 Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
2 Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA

Calculation of Surface Acoustic Waves on a Piezoelectric Substrate using Amazon™ Cloud Computing

U. Vogel , M. Spindler , S. Wege , T. Gemming

Leibniz Institute for Solid State and Materials, Dresden, Germany

Chemical Reaction Engineering: Difusão com Biotransformação

D. R. M. Vieira , S. A. Cardoso , A. S. Santos

Universidade Federal do Pará, Pará, Brasil

Design & Simulation of Various Shapes of Cantilever Beam for Piezoelectric Power Generator

P. Graak 1, S. Kaur 1, A. Gupta 1, P. Chhabra 1, D. Kumar 1, A. Shetty 2

1 Kurukshetra University, Kurukshetra, Haryana, India
2 Indian Institute of Science, Bengaluru, Karnataka, India

Design and Analysis of Microcantilevers for Sensor Applications

R. Phadke 1, R. Pramodhini 1, A. Tiwari 2

Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM)

B. Park , T. Chen , C. Shafai

Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada

Design and Simulation of MEMS Micro Heater for DNA Amplification

D. Sharma , A. Siddiqua

Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Design and Simulation of Underwater Acoustic MEMS sensor

S. Prabhu , Nagbhushan

Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Design of FIDT for 3D Analysis of MEMS Based Gas Sensor Using SAW Technology

V. S. P. Rajesh

St. Mary's Group of Institutions, Hyderabad, India

Design, Simulation, and Fabrication of Thermal Angular Accelerometers

H. Alrowais

School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA

Electric Field Assisted Formation of Polymeric Hollow Microstructures

Vivek , S. Baranwal , A. Bindal , R. Mukherjee , A. Atta

IIT Kharagpur, West Bengal, India

Enhanced Second-Harmonic Generation in AlGaAs Nanoantennas

L. Carletti , D. Rocco , A. Locatelli , C. De Angelis

University of Brescia, Italy

Evaluation of Efficiency Factors of Commercial Thermoelectric Materials Using COMSOL Multiphysics® Software

K. Cadien , S. Seif , T. Thundat

Department of Chemical & Materials Engineering, University of Alberta, Edmonton, AB, Canada

Extraction of Electrical Equivalent Circuit of One Port SAW Resonator Using FEM-based Simulation

A. K. Namdeo , H. B. Nemade

Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati, Assam, India

FEM Modeling in Robust Design for Graphene-Based Electromagnetic Shielding

S. Elia , G. Granata , P. Lamberti , V. Tucci

University Of Salerno, Italy

Finite Element Simulation of a Surface Acoustic Wave Driven Linear Motor

B. Behera , H. B. Nemade , S. Trivedi

Indian Institute of Technology Guwahati, Guwahati, Assam, India

Janus 颗粒自驱运动的数值模拟

崔海航 , 王雷磊 , 谭晓君

西安建筑科技大学,西安,陕西,中国

MEMS Based Sensor for Blood Group Investigation

M. Kaushik , S. Katti , V. Saradesai , P. Naragund , P. Vidhyashree , A. K. V. Nandi

B.V. Bhoomaraddi College of Engineering and Technology, Hubli, India

MEMS Electrostatic Acoustic Pixel

A. Arevalo 1, D. Conchouso 1, D. Castro 1, I. G. Foulds 2

1 Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
2 The University of British Columbia, School of Engineering, Vancouver, BC, Canada

MEMS based Gecko Foot for Micro Robotics

A. Pasumarthy , H. Sinha , A. Islam

Birla Institute of Technology, Mesra, Ranchi, Jharkhand, India

Modelagem Computacional de Difusores para Microbombas

A. G. S. Barreto Neto 1, A. M. N. Lima 2, C. S. Moreira 1

1 Instituto Federal de Ciência e Tecnologia - IFPB, João Pessoa, PB, Brasil
2 Universidade Federal de Campina Grande - UFCG, Campina Grande, PB, Brasil

Modeling Directed Self-Assembly of Block Copolymers for Lithographic Applications

A. Fouquet 1, R. Orobtchouk 2, J. Hazart 1

1 CEA-LETI, Grenoble, France
2 Institut des Nanosciences de Lyon (INL), Villeurbanne, France

Modeling and Simulation of Damping Resistance of a Cantilever Based Energy Harvester

M. I. Hassan 1, A. Brimmo 1, A. N. Chatterjee 2

1 Masdar Institute of Science and Technology, Abu Dhabi, UAE
2 MEMS Department, GLOBALFOUNDRIES, Singapore, Singapore

Nanowire Based Flexible Piezoelectric Sensor for Structural Health Monitoring Applications

A. El Kacimi 1, E. Pauliac-Vaujour 1, J. Eymery 2

1 University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
2 University Grenoble Alpes, CEA, Grenoble, France

Nonlinear Optics in Plasmonic Nanostructures

G. Bachelier 1, L. Olgeirsson 1, S. Waterman 2, J. Sharma 3, E. Dujardin 3, A. Bouhelier 4, S. Huant 1

1 Institut Néel, CNRS - Joseph Fourier University, Grenoble, France
2 Imperial College, London, England
3 CEMES, CNRS, Toulouse, France
4 LICB, CNRS – Bourgogne University, Dijon, France

Numerical Analysis on Plasmonic Nano-Cucumber Achieving Large EFs and Wide Tuneability of the Peak

A. Zare , E. Cutler , H. Cho

Center for Biomedical Engineering & Science, University of North Carolina - Charlotte, Charlotte, NC, USA

Optimization of MEMS Based Capacitive Accelerometer for Fully Implantable Hearing Aid Application

A. Dwivedi , G. Khanna

NIT Hamirpur, Hamirpur, Himachal Pradesh, India

PVDF Piezoelectric Nanofibers as Hair Cell Substitutes: A Feasibility Study

C. R. Pérez 1, J. J. Santiago-Avilés 2

1 Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA, USA
2 Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA

Parametric Simulation of PZT Diameter to Hole Ratio for Optimized Membrane Displacement

A. Arevalo 1, D. Castro 1, D. Conchouso 1, I. G. Foulds 2

1 Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Saudi Arabia
2 The University of British Columbia, School of Engineering, Okanagan Campus, Saudi Arabia

Piezoelectric Vibration Energy Harvester Based on Thickness-Tapered Cantilever

S. Kundu , H. B. Nemade

Indian Institute of Technology Guwahati, Guwahati, Assam, India

Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening

A. Ivanov , U. Mescheder

Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany

Residual Stress in the Silicon Membrane of Circular CMUT

A. T. Galisultanov , P. Le Moal , V. Walter , G. Bourbon

FEMTO-ST, Besanson, France

Simulation of a Buckled Cantilever Plate with Thermal Bimorph Actuators

A. Arevalo 1, D. Conchouso 1, D. Castro 1, M. Diaz 2, I. G. Foulds 3

1 CEMSE Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
2 Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
3 University of British Columbia, Vancouver, BC, Canada

Simulation of a Dual Axis MEMS Seismometer For Building Monitoring System

M. A. Shah , F. Iqbal , B. L. Lee

Korea University of Technology and Education, Cheonan, Chungcheong, South Korea

Simulation of a Tether Structure for Ultra-stretchable Monolithic Silicon Fabric

A. Arevalo 1, J. Prieto 1, M. M. Hussain 1, I. G. Foulds 2

1 Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
2 The University of British Columbia, School of Engineering, Vancouver, BC, Canada

Simulation of a Thermoelectric Spiral Structure

A. Arevalo 1, J. P. Rojas 1, D. Conchouso 1, M. M. Hussain 1, I. G. Foulds 2

1 Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia
2 The University of British Columbia, School of Engineering, Okanagan Campus, Canada

Simulation of an AlN Thin Film Resonator for High Sensitivity Mass Sensors

M. Maitra , H. B. Nemade , S. Kundu

Indian Institute of Technology Guwahati, Guwahati, Assam, India

Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness

Y. Jin , S. Kumar , R. A. Gerhardt

School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA

Statistical Modeling and Contact Analysis of RF MEMS Surface

J. Liu 1, V. B. Chalivendra 1, C. Goldsmith 2, W. Huang 1

1 Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
2 MEMtronics Corporation, Richardson, TX, USA

Stress Induced by Silicon-Germanium Integration in Field Effect Transistors

R. Berthelon 1, D. Dutartre 1, F. Andrieu 2

1 STMicroelectronics, France
2 CEA Leti, France

Study of Capacitance in Electrostatic Comb-Drive Actuators

P. Hanasi , B. G. Sheeparamatti , V. Abbigeri , N. Meti

Visvesvaraya Technological University, Belagavi, Karnataka, India

Surface Charge Modulated Ionic Conductance of Closed Solid State Nanopore Biosensors

H. Ghosh , C. Roychaudhuri

Indian Institute of Engineering Science and Technology (IIEST), Shibpur, Howrah, West Bengal, India

Three-Dimensional Modeling of Electrical Scanning Probe Microscopy Problems

G. Gomila 1, L. Fumagalli 2, R. Fabregas 3

1 Institut de Bioenginyeria de Catalunya (IBEC), Departament d’Electrònica, Universitat de Barcelona, Barcelona, Spain
2 School of Physics and Astronomy, University of Manchester, Manchester, United Kingdom
3 Institut de Bioenginyeria de Catalunya (IBEC), Universitat de Barcelona, Barcelona, Spain

Ultrasensitive Mass Sensing Through Coupled Microelectromechanical Resonator Arrays

A. R. Hambarde , R. M. Patrikar

Visvesvaraya National Institute of Technology, Nagpur, Maharashtra, India


ISBN: 978-0-9910001-2-8
ISSN: 2372-2215