Plasma

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Physics Interfaces and Study Types
ExpandBoltzmann Equation, Two-term ApproximationYes
ExpandCapacitively Coupled PlasmaYes
ExpandDC DischargeYes
ExpandDrift DiffusionYes
ExpandHeavy Species TransportYes
ExpandInductively Coupled Plasma*YesYes
ExpandMicrowave Plasma*YesYes
Boundary Conditions
ExpandElectronsYes
ExpandHeavy SpeciesYes
Discretization
Finite ElementYes
Finite VolumeYes
Thermodynamic and Transport Property Data Import
CHEMKIN file import of thermo and transport dataYes
Volumetric Domain Properties
1D, 2D, Axisymmetric, and 3D FormulationsYes
Collisionless HeatingYes
Drift Diffusion ModelYes
Electron Production RateYes
General Power DepositionYes
Inductive Power DepositionYes
Microwave Power DepositionYes
ReactionYes
Species, Non-ElectronYes
Thermal Diffusion of ElectronsYes
ExpandElectron Energy Distribution FunctionYes
ExpandElectron Impact ReactionYes
Diffusion-Models for Heavy Species Transport
Fick's LawYes
Mixture-AveragedYes
* = Requires all indicated products