Parameter Extraction and Support-Loss in MEMS Resonators

Peter Steeneken
Project Leader
RF MEMS Research Group
NXP Semiconductors
Eindhoven, The Netherlands

In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the frequency dependent admittance of a diamond disk resonator. Results agree well with measurements and analytic results. Comparison to a frequency response analysis establishes the validity of the method and shows that it results in a large reduction of the simulation time.

Keynote speaker's biography:

Peter Steeneken received his Ph.D. from the University of Gr├Âningen, the Netherlands, where he studied magnetic and superconducting materials using optical and electron spectroscopy. In 2002, he joined Philips Research where he investigated Micro-Electromechanical Systems (MEMS).

In 2006, Dr. Steeneken became the project leader of the RF MEMS Research project group at NXP Semiconductors, a company founded by Philips. His current interests include the design, simulation, reliability and characterization of RF MEMS switches.